Home - Products - Spin Coater and Spray Pyrolysis - Ultrasonic Spin-Spray Coater for 12 inch sample KS-SP-300USS
KS-SP-300USS is a cost-effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed air-assisted ultrasonic spray nozzle mounted on a swing arm
Technical Parameters
KS-SP-300USS is a cost-effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed air-assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp system for substrate heating. It also can be considered as a atmosphere mist CVD system
Technical Parameters:
| Model | KS-SP-300USS |
| Features | · Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate· Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate· The system also works on spin alone and spray alone modes |
| Spin Coater | · Vacuum chunk with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square· One oil-less pump for the vacuum chunk is included and controlled by the spin coater· Spin speed: 300 - 3000 rpm adjustable· For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8" |
| Ultrasonic Spray Nozzle | · One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included· Two spray nozzles with the KF-25 adapter are included. o One cylindrical type -- narrower spray ~20 mm diametero One cone type -- wider spray ~40 mm diameter· Recommended compressed air pressure for aqueous solution: ~2 psi· One flow meter is integrated for regulating and monitoring the compressed air flow· Fluid viscosity range: 1 - 50 mPa·s (cP)· One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range |
| Heatable Syringe Pump | · A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzle· One 50 mL syringe is included for immediate use. The unit can accommodate syringe with 0.4 - 30 mm diameter· Pumping rate: 0.1 - 45 mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)· Flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C |
| Heat Lamp and Control | · Duo heat lamps (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for heating substrate by radiation (up to 65 ºC with 12" metal substrate) |
| Optional | · The spin-spray system without heat lamp can fit into MTI's bench-top fume hood · A secondary ultrasonic spray unit can be ordered and mounted on the swing arm for co-deposition or co-precipitation process· For the above application, an independently controlled, two-channel heatable syringe pump can be ordered at extra cost to replace the standard syringe pump |
| Utility Requirement | · Power: 208 - 240 VAC, 50/60 Hz, 3000 W in total· Gas: ~2 psi compressed air for the ultrasonic nozzle. Air compressor is also available for order at CY |
| Net Weight | · 160 lbs |
