Home - Products - Spin Coater and Spray Pyrolysis - EZ4 spin coater for Photoresist with PP material chamber
KS-SP-EZ4 is an economic desktop Vacuum Spin Coater which is designed for quality coating of sol-gel at the lowest cost.
It is suitable for photoresist and laboratary application.
Technical Parameters
KS-SP-EZ4 is an economic desktop Vacuum Spin Coater which is designed for quality coating of sol-gel at the lowest cost. By using adhesive tape to stick and hold samples on the rotating plate, the instrument provides the advantages of cost effectiveness and ease of maintenance. Complete accessories such as vacuum chuck, oilless vacuum pump, electrical wire is included for immediately use.
Technical Parameters:
| Product Name | Vacuum Spin Coater |
| Chamber size | 1.Chamber diameter: 190mm diameter 2.Maximum wafer sample: 4" diameter at Max. |
| Vacuum Chuck | 3 Pieces standard vacuum chuck for use |
| Spin Speed | 1.Digital display with variable speed up 100 to 9999 RPM 2.Programmable segments of different spin times,5 programmable with 5 steps of each program. 3.Speed resolution:1rpm |
| Voltage | Wide range AC100~230V, adjustable |
| Dimension | 250*210*200mm |
| Optional parts | 1.You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating 2.Using plasma cleaner to treat substrate surface before coating can improve film quality |
