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Automated Ultrasonic Spin-Spray Coater for 12 inch Wafer Max with Heater & Fume Hood

KS-ESP-USC300 ultrasonic atomization spin coating machine is a liquid film preparation equipment integrating ultrasonic atomization, liquid injection and spin coating. 

This equipment is widely used in education and scientific research units, as well as in the development of thin films including solar cells.

Technical Parameters

Product Description:

KS-ESP-USC300 ultrasonic atomization spin coating machine is a liquid film preparation equipment integrating ultrasonic atomization, liquid injection and spin coating. The equipment adopts a box structure, KS-ESP-USC300 ultrasonic atomization rotary film coating machine, the glue sprayer uses a microprocessor to control the volumetric pump to deliver the solution accurately; the atomizer is fixed on a support arm that can swing within a certain range, so as to ensure The uniformity of the coating, through the deposition of the mist particles sprayed by the ultrasonic atomizer on the substrate, a thinner micro-nano coating can be prepared; KS-ESP-USC300 ultrasonic atomization rotary coating machine, the glue sprayer can The diameter of the substrate can be as long as 12" (300mm), and the film can be heated and dried quickly after coating to meet the needs of the experiment. This equipment is widely used in education and scientific research units, as well as in the development of thin films including solar cells.

Product Features:

1. The machine integrates ultrasonic atomization, liquid injection, spin coating and heating.
2. It adopts infrared heating method, and the heating speed is fast.
3. This equipment is equipped with a vacuum pump as standard, and the vacuum pump is used to absorb and fix the sample. The compressor enhances the directionality of the spray and reduces the splash of the spray. The air compressor is not standard.
4. The liquid injection system can be equipped with a single-channel or multi-channel liquid injection system.
5. The equipment is equipped with an exhaust system, which can clear the tank Steam and odor of the material liquid in the body.
6. A gas filter device can be added to filter the toxic and harmful gases discharged to reduce environmental pollution.

7. The equipment is equipped with an infrared alignment mechanism, which can use infrared rays to determine the starting position of spraying

8.The LED lighting system is used in the box, which has a longer service life and brighter light.
9. There is a movable thermocouple in the box, which can accurately measure the temperature of each point in the box.
10. The ultrasonic atomization nozzle station can be increased , up to 4 stations.

Technical Parameters:

ModelKS-ESP-USC300
 Power supply 220V 50Hz, total power <1800W
Arm swing   angle 0-60°; swing arm speed  1-20°/s adjustable
Coating   time 1-999s adjustable
Spindle   speed 30-3000rpm (30rpm integers are increments)
 Infrared heating RT—80°C, heating power 1000W
Sample   loading plate diameter φ203mm, the maximum diameter of the film-coating   sample is 12 inches.
Ultrasonic nozzle frequency 40KHz; amplitude gear  1, 2, 3 gears can be switched. (The   total power of the ultrasonic controller is 200W, and the control current is   automatically adjusted.)
The diameter of the exhaust   outlet φ100mm. 
Total   weight of equipment 100kg
Liquid Particle   size 10um-20um Particle size ≤50um 
Liquid Flow   size ≤0.35ml/s
Liquid Solid   content ≤ 10% 
Liquid Viscosity   size ≤ 35cPs 
Product   Dimensions600×600×800mm