Home - Products - Spin Coater and Spray Pyrolysis - AC200 Precision Program-controlled Vacuum Spin Processor for 200mm MAX Wafer
KS-SP-AC200 is an economic desktop Vacuum Spin Coater which is designed for quality coating of sol-gel at the lowest cost.
Technical Parameters
KS-SP-AC200 is an economic desktop Vacuum Spin Coater which is designed for quality coating of sol-gel at the lowest cost. By using adhesive tape to stick and hold samples on the rotating plate, the instrument provides the advantages of cost effectiveness and ease of maintenance. Complete accessories such as vacuum chuck, oilless vacuum pump, electrical wire is included for immediately use.
Technical Parameters：
| Product Name | Vacuum Spin Coater |
| Chamber size | Maximum wafer sample: 200mm Max. |
| Vacuum Chuck | 3 Pieces standard vacuum chuck for use |
| Spin Speed | 1.Digital display with variable speed up 0 to 10000 RPM 2.Programmable segments of different spin times,100 programmable with 100 steps of each program. 3.Speed resolution:1rpm |
| Accelerated speed | 100~50000rpm/s |
| Voltage | Wide range AC100~230V, adjustable |
| Coating Uniform | <+/-3% |
| Optional parts | 1.You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating 2.Using plasma cleaner to treat substrate surface before coating can improve film quality |
