High precise screw drive structure, linear movement,Up to 500 degrees temperature with high stability
Technical Parameters
◆ Features/ Applications
◆ Up to 8 inches wafer
◆ High precise screw drive structure, linear movement
◆ Up to 500 degrees temperature with high stability
◆ Capable for IV/CV/RF tests
◆ Modular design, seamless upgrade
Technical Parameters:
Model | KS-MS-CS-4 |
Chuck size | 4"/6"/8" |
Rotation angle | 360°with angle locking, fine-tuning for 15° with 0.1μm resolution |
X-Y travel range | 4"* 4"/ 6"* 6"/8"*8" |
X-Y travel resolution | 10μm/1μm |
Sample holding mode | Vacuum adsorption |
Chuck capacity | U shape, up to 8 micropositioners |
Electrical design | Chuck back is electrical floating, can be used as gate electrode |
Temperature range | Ambient temperature to 300/400/600 degrees upon request |
Temperature control accuracy | 1 ° / 0.1° / 0.01 ° upon request |
stability | ± 1° / ± 0.1° |
Dimension | 400L*400W*600H/580L*480W*600mmH/840L*600W*700mmW |
Weight | 30KG/60KG/100KG |