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PVD Coating Machine

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up to 500C high temperature probe station

High precise screw drive structure, linear movement,Up to 500 degrees temperature with high stability


Technical Parameters

◆ Features/ Applications

◆ Up to 8 inches wafer

◆ High precise screw drive structure, linear movement

◆ Up to 500 degrees temperature with high stability

◆ Capable for IV/CV/RF tests

◆ Modular design, seamless upgrade

Technical Parameters:

ModelKS-MS-CS-4
Chuck size4"/6"/8"
Rotation angle360°with angle locking, fine-tuning for 15° with 0.1μm resolution
X-Y travel range4"* 4"/ 6"* 6"/8"*8"
X-Y travel resolution10μm/1μm
Sample holding modeVacuum adsorption
Chuck capacityU shape, up to 8 micropositioners
Electrical designChuck back is electrical floating, can be used as gate electrode
Temperature rangeAmbient temperature to 300/400/600 degrees upon request
Temperature control accuracy1 ° / 0.1° / 0.01 ° upon request
stability± 1° / ± 0.1°
Dimension400L*400W*600H/580L*480W*600mmH/840L*600W*700mmW
Weight30KG/60KG/100KG