KS-PEALD-700 is a compact plasma-enhanced atomic layer deposition (PE-ALD) system with five high-frequency valves,
This PE-ALD has several advantages, such as a wide range of precursor selection and operation temperature windows
(especially good for heat-sensitive material at low temperatures), uniform coating with rotary stage, and low cost.
Technical Parameters
Product Description:
KS-PEALD-700 is a compact plasma-enhanced atomic layer deposition (PE-ALD) system with five high-frequency valves ,and it is desktop ALD&CVD&PECVD system equipped with 4 high-frequency valves, 4-inch gas dispersion nozzle and rotating heating sample stage. This equipment is a cost-effective ALD system. The PE-ALD processes can be realized by the screen panel control system and laptop software control system. This PE-ALD has several advantages, such as a wide range of precursor selection and operation temperature windows (especially good for heat-sensitive material at low temperatures), uniform coating with rotary stage, and low cost.
Technical Parameters:
| Model | KS-PEALD-700 |
| Power supply | AC 220V 50/60HZ |
| Power | 3.8KW |
| Minimum control switching time | 0.5 seconds |
| Maximum temperature resistance of the valve | 232°C |
| Working environment temperature | 5-45℃ |
| · Maximum withstand pressure | 3*106Pa |
| · Accuracy | ±1.5%FS |
| · Mixing tank volume | 150ml (150ml, 300ml, 600ml, 1000ml optional) |
| · Material of mixing tank | 316L |
| · Maximum pressure | 0.15MPa |
| · Pressure gauge range | -0.1MPa—0.15MPa |
| · Maximum heating temperature | 200℃ |
| · Temperature control accuracy | ±1°C, can realize 28-segment program PID temperature control |
| · Speed of rotation sample stage | 1-5RPM |
| · Temperature of sample stage | maximum temperature 700°C (<1h); long-term use temperature 500°C |
| · Temperature control accuracy of sample stage | ±5°C, can realize 28-segment program PID temperature control; |
| · Maximum size of substrate that can be deposited | φ100mm (φ4") |
| RF power frequency | 13.56Mhz |
| RF power out put | 5-100W or as customized |
| Reflected power of RF | up to 20W |
| Cooling | Air cooling |
| Dimension of ALD system | 700*600*1400mm (L×W×H) |
