The perovskite coating machine is mainly composed of organic/metal source evaporation deposition chamber, vacuum exhaust system, vacuum measurement system, evaporation source, sample heating temperature control, electric control system, gas distribution system and other parts.
Technical Parameters
Product Introduction:
The perovskite coating machine is mainly composed of organic/metal source evaporation deposition chamber, vacuum exhaust system, vacuum measurement system, evaporation source, sample heating temperature control, electric control system, gas distribution system and other parts. It is suitable for the preparation of simple metal thin films, semiconductor thin films, oxide thin films, organic thin films, etc. It can be used in scientific research units for new materials and new process thin film research work, and can also be used for test work before mass production. It is widely used in organic, inorganic, Research fields such as perovskite thin-film solar cells and OLEDs. During the working process of the perovskite coating machine, the sample is located above the vacuum chamber, the evaporation source is located below the vacuum chamber, and the coating is evaporated upward, and the evaporation source has a baffle device to prevent the evaporation source from being contaminated.
Main Feature:
1. The sample is located above the vacuum chamber, the evaporation source is located below the vacuum chamber, and the coating is evaporated upward, and the evaporation source has a baffle device.
2. Equipped with baking heating function, which can heat the sample during the coating process. The maximum baking heating temperature is 180℃.
3. Equipped with water and power failure interlock protection alarm device and anti-misoperation protection alarm device.
Technical Parameters:
1. Coating room: stainless steel material, adopting a square front and rear door structure, with anti-fouling board inside, the chamber size is about 600mm×450mm×450mm
2. Vacuum exhaust system: molecular pump + mechanical pump system
3. Vacuum degree: the ultimate vacuum of the coating chamber≤6×10-4Pa
4. System leakage rate: ≤1×10-7Pa
5. Evaporation source: installed on the bottom of the vacuum chamber; 4 organic evaporation sources, volume 5ml, 2 evaporation power sources, can measure and control temperature, heating temperature 400℃, power 0.5KW; 4 sets of inorganic evaporation sources, Volume 5ml, 2 evaporation power supplies, heating current 300A, power 3.2KW; The evaporation source baffle adopts automatic magnetic control to control its opening
6. Sample rack: Installed on the upper cover of the vacuum chamber, can place Ø120mm samples and glass slides, and the rotation speed is 0-30rpm
7. Heating temperature: RT-180℃, temperature measurement and temperature control
8. Film thickness control instrument: quartz crystal oscillator film thickness control instrument, film thickness measurement range 0-999999Å
