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PVD Coating Machine

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8 inch wafer middle-sized probe station

Compatible with high magnification metalloscope, fine-tuning movement,For I-V/C-V, PIV, optoelectronic test


Technical Parameters

Features/ Aplications

◆ For I-V/C-V, PIV, optoelectronic test

◆ Up to 8 inch wafer

◆ Precise screw drive structure, linear movement

◆ Compatible with high magnification metalloscope, fine-tuning movement

◆ Capable to be upgraded for RF test, high current test and laser repair applications

Technical Parameters:

ModelKS-MS-CL-8
Chuck size4"/ 6" /8"
Rotation range360° with angle locking, fine-tuning for 15° with 0.1° resolution
X-Y travel range4"*4"/6"*6"/8"*8"
X-Y travel resolution10μm/2μm/0.7μm/0.5μm
Z travel range10mm
Sample mounting typeVacuum
Chuck capacityUp to 6 micropositioners
Electrical designElectrical floating on chuck back, can be used as gate electrode
Dimension400mmL*400mmW*600mmH/580mmL*480mmW*600mmH