Compatible with high magnification metalloscope, fine-tuning movement,For I-V/C-V, PIV, optoelectronic test
Technical Parameters
Features/ Aplications
◆ For I-V/C-V, PIV, optoelectronic test
◆ Up to 8 inch wafer
◆ Precise screw drive structure, linear movement
◆ Compatible with high magnification metalloscope, fine-tuning movement
◆ Capable to be upgraded for RF test, high current test and laser repair applications
Technical Parameters:
Model | KS-MS-CL-8 |
Chuck size | 4"/ 6" /8" |
Rotation range | 360° with angle locking, fine-tuning for 15° with 0.1° resolution |
X-Y travel range | 4"*4"/6"*6"/8"*8" |
X-Y travel resolution | 10μm/2μm/0.7μm/0.5μm |
Z travel range | 10mm |
Sample mounting type | Vacuum |
Chuck capacity | Up to 6 micropositioners |
Electrical design | Electrical floating on chuck back, can be used as gate electrode |
Dimension | 400mmL*400mmW*600mmH/580mmL*480mmW*600mmH |