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500°C Vacuum Lamination Press with Optional Platen from 4inch to 15 inch Square

500ºC Vacuum Heat Press KS-VHP-40T is an electric vacuum flat-bed vacuum heat press, which is specially used for wafer welding and film transfer.

Technical Parameters

Product Description:

500ºC Vacuum Heat Press KS-VHP-40T is an electric vacuum flat-bed vacuum heat press, which is specially used for wafer welding and film transfer. It can handle a maximum sample size of 400mm×400mm and a maximum working temperature of 500°C. The maximum pressure that can be applied to the sample at this temperature is 40T.

Product Features:

1. There is a 1000W heating tube embedded in the middle of the heating platform, which can achieve rapid heating effect; the top of the heating platform is equipped with a water cooling tube (when the working temperature is higher than 200 , please inject cooling water (>15L/min)) to achieve rapid heating. cooling effect.
2. Two precision temperature controllers are used to independently control two heating platforms, and 30 heating and cooling programs can be set, and PID mode is used for temperature adjustment, with overheating and burnout protection functions.
3. Using temperature control software and PC interface, the temperature program and temperature curve can be imported into the computer.
4. The digital pressure display is installed outside the vacuum chamber, and its pressure can be set. When the pressure reaches the set value, the motor will stop automatically.
5. Both the hydraulic device and the heating table are placed in the vacuum chamber, and the chamber is made of 304 stainless steel and welded with reinforcing ribs (to prevent the chamber from deforming under vacuum).
6. There is an observation window at the front end of the vacuum chamber.
7. A high-sensitivity vacuum gauge is installed on the vacuum chamber to measure the vacuum inside.

Technical Parameters:

Product ModelKS-VHP-40T hot press machine
Voltage and PowerAC 208-240 V, 50/60 Hz,
  Single Phase, 6500 W
Heating Plantens Area400 x 400 mm  (~16 x16")
Max. Opening of Two Plantens40 mm
Chamber Size & Capacity700 L x650 W x 550H (mm)
  ~250 liter
Max. Pressing Force
  on Heated Platen
30 Metric Tons at 500°C 
  40 Metric Tons at RT 
Dimensions900 (L) x 700(W) x 1,300 (H),mm
Vacuum Hot Press StructureTwo flat heating platens made of   high-temperature alloy with max. the working temperature of 500ºCThe Heating element is inserted into the   center of the heating plates for fast heatingTwo precision temperature controllers   which control two heating plates separately with 30 programmable segmentsWater cooling jackets are built on both   the top & bottom of the heating plates for assisting cooling. Cooling   water inlet and outlet are for 12mm O.D polyurethane tube.
Hydraulic PumpMax. the travel distance of the bottom   ram: 15 mmAutomatic max. pressure controlled via a   digital pressure gauge.Pressure accuracy: +/-0.01 Mpa ( 0.1   kg/cm²)Water cooling  (>16L/min) is   required to cool the heating plates when the temperature is over 200 ºC.
Temperature control and Pressure   DisplayTwo precision temperature controllers   with 30 programmable segments control the heating plates   separately with +/1°C accuracy. The temperature controllers have PID   auto-tune function, over-temperature protection, and thermal couple   broken protectionMax. Temperature: 500°C with inert gas   or vacuum with accuracy +/-1°CMax. Heating rate:  5°C/minA digital pressure meter ( controller )   is built in the control panel. You can set pressure at the desired value   which can stop the electric hydraulic press automatically
Vacuum ChamberElectric hydraulic press and heating   plates are placed inside the vacuum chamberThe vacuum chamber is made of SS304400mm dia. vacuum-sealed hinged type   door with the quartz glass window is installed for easy sample loading and   observationSilicone O-ring can be used for all   vacuum sealingsOne precision digital vacuum gauge (   10E-4 torr ) is installed on the vacuum chamber