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12 inch High Speed Automatic CMP Polisher with Auto Slurry Feeder

KS-GP-1203 is a 12" polisher designed for chemical mechanical polishing. The polishing parts are utilized anti-corrosive materials in order to avoid chemical corrosion. Two working stations are equipped along with an automatic slurry feeder and high precision polishing fixture to meet the processing requirements.


Technical Parameters

Product Description:

KS-GP-1203 is a 12" polisher designed for chemical mechanical polishing. The polishing parts are utilized anti-corrosive materials in order to avoid chemical corrosion. Two working stations are equipped along with an automatic slurry feeder and high precision polishing fixture to meet the processing requirements.

Technical Parameters:

ModelKS-GP-1203
FeaturesSuper flat stainless steel polishing plate (RMS: Flatness < 0.25 micron / inch²)High precision rotating plate run-off < 5 micronsColor touch screen for polishing settings Two working stations with individual controlFully automatic control panel to adjust rotating speed, yoke speed and polishing duration, etcAutomatic slurry feeder with feeding speed control High precision polishing controller to adjust pressure and flatnessMachine body utilized anti-corrosive materials
Power208 - 240 VAC, 50 Hz, 450W
Polishing PlateSize: 300 mm diameterSpeed: 1 - 240 rpm adjustableWorking station: 2Sample holder diameter: 105 mmConditional ring diameter: 127.5 mm
High Precision Polishing Fixture (Optional)Maximum sample diameter: 100 mm (4")Maximum sample thickness: 12 mmSample holder travel distance: 12 mm Max. (vertical movement)One digital micrometer is included with a resolution of +/- 1 micron for more accurate lapping
Automatic Slurry FeederVolume of slurry up to 1.0 Gallon (~3.8L)Can feed any abrasive or polishing slurry with particle size < 40 micronsRotation speed: 8~20 RPMCan be upgraded to four channel automatic slurry feeder at an extra cost
Other Optional AccessoriesAutomatic mounting press for metallographic sample preparation Six-slot sample loading plate is available at extra costConsumables for lapping/polishing, such as sandpaper discs, polishing pads , magnetic & buffer steel plates and diamond polishing paste
Dimension550 mm L × 700 mm W × 420 mm H without optional accessories1,000 mm L ×700 mm W × 870 mm H with optional accessories  
Net Weight74 kg