Home - Products - CVD Coating Machine - Liquid-gas CVD all-in-one machine for synthesize fiber or nano material with exhaust gas treatment
Chemical vapor deposition (CVD) refers to the chemical gas or vapor.The steam reacts on the surface of the substrate to synthesize a coating or nano. The method of rice materials is the most widely used technique in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metallic materials and metal alloy materials
Technical Parameters
Product Features:
1.1 Ensure an anaerobic working environment through a high-precision oxygen analyzer;
1.2. The material can fully contact with the reaction gas to the greatest extent in a stable and uniform temperature field in the special-shaped quartz chamber based on the rotating shimmy structure;
1.3. The unique suspended gas phase generator can maintain a horizontal and stable output while the working chamber is shaking;
1.4. Multi-channel mass flow controller can precisely control the gas flow;
1.5. High-tight connection technology ensures no leakage of flammable gases and toxic and harmful gases. High-sensitivity pressure sensors and solenoid valves can ensure that the pressure in the working chamber is always within the set range;
1.6. The flammable, explosive, toxic and harmful gas detector is linked with the equipment, which can obtain real-time data in time and take corresponding closing measures. At the same time, the two alarm devices will issue an early warning prompt when the set warning value is exceeded;
1.7. The exhaust gas discharged from the working chamber is harmlessly treated through the exhaust gas treatment tank.
Technical Parameters:
Product model | KS-CVD-T1200-150 |
Votalge supply | 380V,3 phase |
Power rate | 8KW |
Heating element | K type |
Max working temperature | ≤1100C |
Temperature accuracy | ±1C |
Heating zone size | Ø150×430mm |
Furnace tube material | high purity quartz tube |
Tube volume | 5L |
Sample available space | 500mL |
Tilt angle | -20 degrees (discharge) ~3 degrees (feed) |
Furnace size | L1550mm×D830mm×H1360mm |
Recommend Heating rate | 10C/min |