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CVD Coating Machine

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High temperature and high vacuum CVD integrated machine with remote control system

The equipment adopts a 15.6-inch large-size full-touch screen intelligent human-computer interaction system, a high-vacuum molecular pump unit, a new generation of oil-free scroll vacuum pump as a backing pump, and a high-precision gas mass flow control system, which can realize samples in high-precision gas Intelligent operation under controlled, high temperature (max: 1600°C) conditions.


Technical Parameters

Technical Parameters:

Product   ModelKS-CVD-T1700-80
Max   temperatures1700C
Max working   temperature≤1600C
Temperature   accuracy±1C
Touch   Screen Size 15.6 inch
Power   rate 10KW
Heating   element B type
Recommend   heating rate≤10C/min
Furnace   tube sizeØ80×1200mm
Ultimate vacuum 6×10ˉ⁴  Pa(with Molecular Pump)
Furnace Dimension L1690mm×H1410mm×D765mm