Home - Products - CVD Coating Machine - High temperature and high vacuum CVD integrated machine with remote control system
The equipment adopts a 15.6-inch large-size full-touch screen intelligent human-computer interaction system, a high-vacuum molecular pump unit, a new generation of oil-free scroll vacuum pump as a backing pump, and a high-precision gas mass flow control system, which can realize samples in high-precision gas Intelligent operation under controlled, high temperature (max: 1600°C) conditions.
Technical Parameters
Technical Parameters:
Product Model | KS-CVD-T1700-80 |
Max temperatures | 1700C |
Max working temperature | ≤1600C |
Temperature accuracy | ±1C |
Touch Screen Size | 15.6 inch |
Power rate | 10KW |
Heating element | B type |
Recommend heating rate | ≤10C/min |
Furnace tube size | Ø80×1200mm |
Ultimate vacuum | 6×10ˉ⁴ Pa(with Molecular Pump) |
Furnace Dimension | L1690mm×H1410mm×D765mm |