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CVD Coating Machine

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CVD system with multi channel float flow meter for nanomaterias

Chemical vapor deposition (CVD) refers to the method of chemical gas or vapor reacting on the surface of the substrate to synthesize coatings or nanomaterials. It is a very widely used technology for depositing thin film materials in the semiconductor industry, including a wide range of insulating materials and Most metal materials and metal alloy materials

Technical Parameters

Product Description:

Chemical vapor deposition (CVD) refers to the method of chemical gas or vapor reacting on the surface of the substrate to synthesize coatings or nanomaterials. It is a very widely used technology for depositing thin film materials in the semiconductor industry, including a wide range of insulating materials and Most metal materials and metal alloy materials. For this reason, we have developed a complete set of CVD coating systems, which are suitable for the fields of materials laboratories, scientific research institutes, environmental sciences and other fields of major universities.

 

Technical parameters:

Product   model KS-CVD1200-110
Working   temperature≤1100C
Heating   zone size 200mm
Voltage   supply 380V, 3 phase
Power   rate 15Kw
Working   pressure range 0-0.15Mpa
Gas   system float flow meter with 2,3,4 channel optional