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Cleaning Machine

Home - Products - Cleaning Machine - 20Mhz frequency quartz glass chamber plasma cleaner with optional 1L,2L,5L and 10L capacity

20Mhz frequency quartz glass chamber plasma cleaner with optional 1L,2L,5L and 10L capacity

Suitable for sensitive products with high cleanliness

The inductively coupled discharge chamber has a uniform glow

20.0MHz is super chemical

It can clean metal and conductive materials


Technical Parameters

ModelKS-PL-1SMKS-PL-2SMKS-PL-5SMKS-PL-10SM
Cavity material qualityQuartz glass
Cavity sizeΦ100×130LmmΦ100×270LmmΦ150×270LmmΦ200×320Lmm
Cavity capacity1L2L5L10L
Electrode platesThere is no electrode plate in the cavity
Form factor650 ×550×480mm L×W×H
Power frequency20.0Mhz
Power supply0-200W (continuously adjustable).
flowmeterHigh precision 2-way float flowmeter
vacuometerPressure gauge (quantitative value display)
Control the processFully automatic control and manual (PLC HMI)
Cleaning time0- 99999S adjustable
Vacuum level1-30pa
Chamber temperature<30℃
Supply voltage220V
vacuum pump2XZ-2(speed 2L/S)2XZ-4(speed 4L/S)