Home - Products - Cleaning Machine - 20Mhz frequency quartz glass chamber plasma cleaner with optional 1L,2L,5L and 10L capacity
Suitable for sensitive products with high cleanliness
The inductively coupled discharge chamber has a uniform glow
20.0MHz is super chemical
It can clean metal and conductive materials
Technical Parameters
Model | KS-PL-1SM | KS-PL-2SM | KS-PL-5SM | KS-PL-10SM | ||
Cavity material quality | Quartz glass | |||||
Cavity size | Φ100×130Lmm | Φ100×270Lmm | Φ150×270Lmm | Φ200×320Lmm | ||
Cavity capacity | 1L | 2L | 5L | 10L | ||
Electrode plates | There is no electrode plate in the cavity | |||||
Form factor | 650 ×550×480mm L×W×H | |||||
Power frequency | 20.0Mhz | |||||
Power supply | 0-200W (continuously adjustable). | |||||
flowmeter | High precision 2-way float flowmeter | |||||
vacuometer | Pressure gauge (quantitative value display) | |||||
Control the process | Fully automatic control and manual (PLC HMI) | |||||
Cleaning time | 0- 99999S adjustable | |||||
Vacuum level | 1-30pa | |||||
Chamber temperature | <30℃ | |||||
Supply voltage | 220V | |||||
vacuum pump | 2XZ-2(speed 2L/S) | 2XZ-4(speed 4L/S) |