KS-PL-4M plasma cleaning
machine has stable performance, high cost performance,
It has the characteristics of
simple operation, extremely low cost of use and easy maintenance. for various
Metals, ceramics, glass,
silicon wafers of any shape and surface roughness,
Ultra-cleaning and
modification of the surface of plastic and other objects to completely remove
samples Organic pollutants on product surfaces.
Technical Parameters
| Product Model | KS-PL-4M |
| External dimensions | 480mm*380mm*420mm |
| Vacuum chamber size | stainless steel chamber, φ150mm*230mm deep |
| Electrode size | 95*170mm, multi-control adaptive flat electrode, |
| Plasma generator | 13.56MHz dedicated plasma source; |
| Frequency | 40kHz (optional); adaptive impedance matching power supply |
| Power | 0-200W continuously adjustable, precision 1W |
| Vacuum gauge | thermocouple vacuum gauge 0-100KPa |
| Gas supply | 1 gas channel, precise needle valve control (can be equipped with a second gas channel) |
| Control method | 4.3-inch touch screen, multi-level application menu, easy and fast operation |
