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Cleaning Machine

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13.56Mhz 30L,60L and 80L capacity plasma cleaner for surface treatment

Ministry of Transportation Space

Internal multi-layer metal sill

Ceramics, plastics, glass activated high efficiency

Intracavitary brightness sufficiency, etc.

BGA, COB, CSP cleaning effect


Technical Parameters

ModelKS-PL-DW30KS-PL-DW60KS-PL-DW80
Cavity material quality316 stainless steel surface treatment
Cavity size300×335×300mm L×W×H350×430×400mm L×W×H400×450×450mm L×W×H
Cavity capacity30L60L80L
Electrode plates3-5   floors3-7   floors3-9 floors
Form factor700×650×1200mm   L×W×H750×700×1250mm   L×W×H800 ×750×1400mm L×W×H
Power frequency13.56Mhz (automatic matching integration)
Power supply0-500W (continuously   adjustable).0-600W (continuously   adjustable).0-800W (continuously adjustable).
flowmeterUltra-precision 2-way electro-flowmeter
vacuometerHigh vacuum silicon measurement and real-time display
Control the processFully automatic control and manual (PLC HMI)
Cleaning time0- 99999S adjustable
Vacuum level1-30pa
Chamber temperature<30℃
Supply voltage380V
vacuum pumpBSV30(speed 10L/S)BSV40(speed   13L/S)BSV60(speed 20L/S)