Home - Products - Cleaning Machine - 13.56Mhz 30L,60L and 80L capacity plasma cleaner for surface treatment
Ministry of Transportation Space
Internal multi-layer metal sill
Ceramics, plastics, glass activated high efficiency
Intracavitary brightness sufficiency, etc.
BGA, COB, CSP cleaning effect
Technical Parameters
Model | KS-PL-DW30 | KS-PL-DW60 | KS-PL-DW80 | |
Cavity material quality | 316 stainless steel surface treatment | |||
Cavity size | 300×335×300mm L×W×H | 350×430×400mm L×W×H | 400×450×450mm L×W×H | |
Cavity capacity | 30L | 60L | 80L | |
Electrode plates | 3-5 floors | 3-7 floors | 3-9 floors | |
Form factor | 700×650×1200mm L×W×H | 750×700×1250mm L×W×H | 800 ×750×1400mm L×W×H | |
Power frequency | 13.56Mhz (automatic matching integration) | |||
Power supply | 0-500W (continuously adjustable). | 0-600W (continuously adjustable). | 0-800W (continuously adjustable). | |
flowmeter | Ultra-precision 2-way electro-flowmeter | |||
vacuometer | High vacuum silicon measurement and real-time display | |||
Control the process | Fully automatic control and manual (PLC HMI) | |||
Cleaning time | 0- 99999S adjustable | |||
Vacuum level | 1-30pa | |||
Chamber temperature | <30℃ | |||
Supply voltage | 380V | |||
vacuum pump | BSV30(speed 10L/S) | BSV40(speed 13L/S) | BSV60(speed 20L/S) |