+86 185 3080 3982

Cleaning Machine

Home - Products - Cleaning Machine - 13.56Mhz 2L,5L and 10L plasma surface treatment for education research

13.56Mhz 2L,5L and 10L plasma surface treatment for education research

Simple manual matching of reflections

Low power for easy operation

The cavity material is available in quartz or stainless steel

The price advantage is comprehensive

The chemical reaction has a significant effect


Technical Parameters

ModelKS-PL-2SMTKS-PL-5SMTKS-PL-10SMT
Cavity material quality316 stainless steel plasma surface treatment/quartz
Cavity size (Stainless steel) Φ100×270Lmm Φ150×270Lmm220×260×200mm L×W×H
Cavity size(Quartz)Φ200×320Lmm
Cavity capacity2L5L10L
Form factor560×540×410mm   L×W×H560×540×410mm   L×W×H650 ×550×440mm L×W×H
Power frequency13.56Mhz
Power supply0-300W (continuously   adjustable)0-500W(continuously   adjustable).
flowmeterHigh precision 2-way float flowmeter
vacuometerPressure gauge (quantitative value display)
Control the processFully automatic control and manual (PLC HMI)
Cleaning time0- 99999S adjustable
Vacuum level1-30pa
Chamber temperature<30℃
Supply voltage220V
vacuum pump2XZ-2(speed 2L/S)2XZ-4(speed 4L/S)