Home - Products - Cleaning Machine - 13.56Mhz 100L,150L and 200L plasma cleaner with max 1000W power supply for surface treatment
Ultra-large-capacity multi-layer horizontal electric plate structure
Optional changeable distance between electric pole plates
Quantity processing for multi-standard products
Hand desk exterior and screen activation top choice
PCB, FPC surface modification treatment
Technical Parameters
Model | KS-PL-DW100 | KS-PL-DW150 | KS-PL-DW200 | |
Cavity material quality | 316 stainless steel surface treatment | |||
Cavity size | 400×500×500mm L×W×H | 500×550×550mm L×W×H | 6 00×630×550mm L×W×H | |
Cavity capacity | 100L | 150L | 200L | |
Electrode plates | 3-9 floors | 3-11 floors | 3-11 floors | |
Form factor | 11 00×700×1500mm L×W×H | 1200×80 0×1700mm L×W×H | 13 00×900×1800mm L×W×H | |
Power frequency | 13.56Mhz (automatic matching integration) | |||
Power supply | 0-750W (continuously adjustable). | 0-1000W (continuously adjustable). | 0-1000W(continuously adjustable). | |
flowmeter | Ultra-precision 2-way electro-flowmeter | |||
vacuometer | High vacuum silicon measurement and real-time display | |||
Control the process | Fully automatic control and manual (PLC HMI) | |||
Cleaning time | 0- 99999S adjustable | |||
Vacuum level | 1-30pa | |||
Chamber temperature | <30℃ | |||
Supply voltage | 380V | |||
vacuum pump | BSV60(speed 20 L/S) | BSV90(speed 30L/S) | BSV90(speed 30 L/S) |